Events & News, Photonics

328. PTB-Seminar on VUV and EUV Metrology

Physikalisch-Technische Bundesanstalt (PTB)
10:00 till 20:00
Physikalisch-Technische Bundesanstalt (PTB)
The seminar, the eighth in a series launched in 2011, is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nano-structured surfaces. Following our seminar, PTB will host the workshop on "Quantification of Uncertainties in Nano-Metrology" (QUNOM) taking place October 16th and 17th, 2025.

Questions about further information may be addressed to: euv2025@noSpamptb.de

Venue: The meeting will take place in the Helmholtz-Building of the Berlin-Charlottenburg campus site of PTB (Abbestr. 2-12, 10587 Berlin). The historical PTB campus is located within walking distance from Kurfürstendamm and Bahnhof Zoologischer Garten, right in the heart of Berlin's 'City West'.

The event is thanksfully supported by HELMHOLTZ FONDS e.V. 

Please find more information here. 

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